APPLICATIONS LOCATOR
Advancing Thermal Wafer Test Technologies

As a leader in precision thermal chuck technologies, ThermoChuck Systems fulfill a wide range of applications:
  • Thermal testing and cycling of wafers (to 300 mm), hybrids and other flat devices.
  • Probing at temperatures from -65 to +400C
  • High probe load applications
  • High power wafer and device testing
  • Femtoamp level, low leakage wafer measurements at temperature
  • Moisture-free cold probing, using Controlled Environment Enclosure
  • Probing at controlled ambient temperature.

Co-Axial and Tri-Axial Chucks are available for

  • High electrical isolation requirements
  • Low current measurements
  • Femtoamp level wafer probing
  • Guarding capability for low leakage applications

The Applications Locator table below will assist you in selecting the best system for your requirements.

Contact Temptronic for application assistance.



Temperature Range (C) ThermoChuck Platform Surface to Ground Capacitance for HIGH ISOLATION ThermoChuck Platform Surface Electrical Isolation for HIGH ISOLATION applications High Power Device / Wafer Testing Probing at Controlled Ambient 300mm wafer probing
TP03000 -65/ +200C 125mm: <375 pf available 150mm: <525 pf available 200mm: <950 pf available standard:109 ohms at 500 V DC between surface and ground at +25C; Higher isolation options available. No Yes No
TP03010A +20/ +200C 125mm: <375 pf available 150mm: <525 pf available 200mm: <950 pf available standard:109 ohms at 500 V DC between surface and ground at +25C; Higher isolation options available No Yes No
TP03010B 0/ +200C 125mm: <375 pf available 150mm: <525 pf available 200mm: <950 pf available standard:109 ohms at 500 V DC between surface and ground at +25C; Higher isolation options available No Yes No
TP0315A +30/ +200C

+30/ +300C
125mm: 4500 pf standard (Low Capacitance option: 500 to 550 pf ); 150 mm: 6000 pf standard (Low capacitance option: 650 to 750 pf ) 109 ohms at 500 V DC between surface and ground; 1012 ohms option available No Yes No
TP0315B 0/ +200C

0/ +300C
125mm: 4500 pf standard (Low Capacitance option: 500 to 550 pf); 150 mm: 6000 pf standard (Low Capacitance option: 650 to 750 pf ) 109 ohms at 500 V DC between surface and ground; 1012 ohms option available No Yes No
TP03500A
 
-65/ +200C <750 pf standard;

<250 pf option available
109 ohms standard

1014 ohms option available
Yes Yes Yes
TP03500C +15 / +200 or +300C

 

<750 pf standard;

<250 pf option available
109 ohms standard

1014 ohms option available
Yes Yes Yes
TP03500D
(300 mm)
+20 / +200 or +300C or +400C <800 pf standard;

<500 pf option available
109 ohms standard

1014 ohms option available
Yes Yes Yes
TP03500E
(300 mm)
Ta (ambient) to +300C  or +400C <800 pf standard;

<500 pf option available
109 ohms standard

1014 ohms option available
Yes Yes Yes



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