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TP0315 A/B
Thermal Inducing Vacuum Platform

Model TP0315A

Standard Temperature Range:
+30°C to +200°C

Extended Temperature Range:
+30°C to +300°C

Model TP0315B

Standard Temperature Range:
0°C to +200°C

Extended Temperature Range:
0°C to +300°C

Chuck Diameters:

5 inch (129mm), 6 inch (154 mm) and 8 inch (203 mm) chucks available to accommodate wafers up to 200mm in diameter.

Chuck Surfaces:

Choice of gold-plated or nickel-plated is standard (Other surface treatments are optional.)

Outstanding Features:

  • Excellent Temperature Uniformity ( ± 0.5°C or ± 0.5% ) of the chuck temperature over the entire temperature range
  • Temperature Accuracy: ± 0.3°C when calibrated against primary or transfer std.
  • Excellent Temperature Stability ( ± 0.1°C) and Control
  • Good Electrical Isolation: 1 gigohm @ 500 VDC between surface and ground
  • Low Noise DC Control system
  • Excellent System and Chuck Reliability
  • Extended Programming Option: Set ramp rate, soak time and number of cycles for temperature cycling.

Standard Features:

  • 5 temperature set points; "At Temperature" Windows programmable from front panel or via remote control.
  • IEEE-488 interface for remote operation
  • Interfaces to most major probing stations, laser trimmers and inspection stations
  • 4 digit LED display


  • Steady State or Thermal Cycling of wafers, ICs and hybrids from 0° to +300°C
  • Low Noise Thermal Testing applications
  • High Isolation and guarded configuration is available for most applications
  • Thermal testing applications requiring low electrical noise.
  • C-V Plotting, Accelerated Life Test
  • Testing devices from 0° to +150°C using ThermoSocket/PCB Assembly
  • Design verification and fault isolation.

See the TP0315 ThermoChuck Datasheet

Temptronic Corporation

  -- TP03500

  -- TP03000

  -- TP03010 A/B

  -- TP0315 A/B