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ThermoChuck®
TP03500



for the testing, cycling and characterization of wafers and other flat devices at precise temperature from:

 -65°C to +300°C




Outstanding Features:

  • Patented TP03500 ThermoChuck design provides exceptional thermal and mechanical stability and precision.
  • Superior Temperature Uniformity:

      At temperatures to +200°C: ±0.5% or ±0.5°C, whichever is greater
      At temperatures = or > 200°C: ±1.0% of set temperature

  • Surface Flatness

      @ +200°C: <12.5 microns ( 200 mm ); <25 microns (300mm)
      @ +300°C: <25 microns

  • Surface to Base Parallelism: <20 microns @ +200°C
  • Surface Isolation: > 109 ohms standard; >1014 ohms available
  • Surface Capacitance at ambient:

      200 mm chuck: <750 pf standard, < 250 pf option available
      300 mm chuck: <800 pf standard, < 500 pf option available

  • Deflection:

      200 mm: <15 microns at 65 Kg
      300 mm: <6 microns at 50 Kg

  • Low noise DC Control System keeps electrical noise to a minimum.
  • Modular System Design for convenient, cost-effective system upgrades as wafer diameter and temperature requirements change.
  • CE Approved, ETL listed for U.S.A. and Canada and Compliant with SEMI S2-93A standards.





Standard Features:

  • Temperature Stability ±0.1°C
  • Precise temperature control and accuracy
  • Ramp/soak/cycle programming is controllable from front panel or via remote interface.
  • IEEE-488 and RS232 remote interface included.
  • Integrates with most major wafer probing stations, laser trimmers and inspection stations.
  • HCFC and CFC-free




Applications:

  • Thermal cycling and steady-state thermal testing of wafers, hybrids and other flat devices at precise temperature
  • Ultra low noise test applications
  • High isolation for low leakage (femtoamp level), low capacitance test measurements; Co-axial and tri-axial configurations are available.
  • Ideal for high power and high probe load applications
  • Cold testing of wafers. Perform moisture-free cold probing with optional Controlled Environment Enclosure


Modular System:

    The TP03500 System controller operates with the user's choice of:

      1) ThermoChuck Diameter
      2) ThermoChuck Surface
      3) High temperature capacity
      4) Low temperature capacity / cooling system
      5) Power Configuration

TP03500 ThermoChuck System Configuration Table

Model TP03500 Temperature Ranges
 

200 mm

300 mm

Model TP03500A -65 / +200C -65 / +200C
Model TP03500C +15 / +200C or +300C +15 / +200C or +300C
Model TP03500D +20 / +200C or +300C or +400C +20 / +200C or +300C
Model TP03500E Ambient (Ta) to +200C or +300C Ambient  (Ta) to +200C or +300C


1) ThermoChuck Diameter:
Choice of 200mm ( 8 inch) or 300mm ( 12 inches) to accommodate wafers up to 300mm in diameter.

2) ThermoChuck Surface:
  Choice of Gold-plated or nickel-plated surface is standard. (Other surface treatments are optional; contact Temptronic).

3) High Temperature Capacity:
  (See ThermoChuck System Configuration Table.)
  200 mm ThermoChuck: Choice of 200ºC, 300C or 400ºC
  300 mm ThermoChuck: Choice of 200ºC or 300ºC

4) Low Temperature Capacity
  Choice of Chiller: see TP03500 Configuration Table.

5) Available in a full range of power configurations. Contact Temptronic for details


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Temptronic Corporation
info@temptronic.com




  -- TP03500

  -- TP03000

  -- TP03010 A/B

  -- TP0315 A/B